High vacuum systems are becoming more common and a number of semiconductor processes already operate in high vacuum.  The following references are ones that I have found useful in performing vacuum system calculations.

Pfeiffer Vacuum, which manufactures vacuum pumps and other components, has a nice PDF handbook which is free to download.  It covers the basics of vacuum as well as operating principles of various pumps and as well as a number of practical issues.
https://www.pfeiffer-vacuum.com/filepool/File/Vacuum-Technology-Book/Vacuum-Technology-Book-II-Part-2.pdf?referer=1456&request_locale=en_US

The Handbook of Vacuum Technology edited by Karl Jousten is a thorough reference with detailed calculations for wide variety of problems in vacuum systems.
amazon.com link

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